Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F23%3A00581641" target="_blank" >RIV/61389021:_____/23:00581641 - isvavai.cz</a>

Result on the web

<a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-8-12449&id=528666" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-8-12449&id=528666</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/OE.486133" target="_blank" >10.1364/OE.486133</a>

Result language

angličtina

Original language name

Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction

Original language description

This paper presents a non-nulling absolute interferometric method for fast and full-area measurement of aspheric surfaces without the necessity of any mechanical movement. Several single frequency laser diodes with some degree of laser tunability are used to achieve an absolute interferometric measurement. The virtual interconnection of three different wavelengths makes it possible to accurately measure the geometrical path difference between the measured aspheric surface and the reference Fizeau surface independently for each pixel of the camera sensor. It is thus possible to measure even in undersampled areas of the high fringe density interferogram. After measuring the geometrical path difference, the retrace error associated with the non-nulling mode of the interferometer is compensated for using a calibrated numerical model (numerical twin) of the interferometer. A height map representing the normal deviation of the aspheric surface from its nominal shape is obtained. The principle of absolute interferometric measurement and numerical error compensation are described in this paper. The method was experimentally verified by measuring an aspheric surface with a measurement uncertainty of λ/20, and the results were in good agreement with the results of a single-point scanning interferometer.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

<a href="/en/project/EF16_026%2F0008390" target="_blank" >EF16_026/0008390: Partnership for excellence in superprecise optics</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2023

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Optics Express

ISSN

1094-4087

e-ISSN

—

Volume of the periodical

31

Issue of the periodical within the volume

8

Country of publishing house

US - UNITED STATES

Number of pages

14

Pages from-to

12449-12462

UT code for WoS article

000975856000002

EID of the result in the Scopus database

2-s2.0-85152482171