Laser-induced electron dynamics and surface modification in ruthenium thin films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F23%3A00582474" target="_blank" >RIV/61389021:_____/23:00582474 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/23:00572145
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0042207X23002427?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0042207X23002427?via%3Dihub</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2023.112045" target="_blank" >10.1016/j.vacuum.2023.112045</a>

Result language
angličtina
Original language name
Laser-induced electron dynamics and surface modification in ruthenium thin films
Original language description
We performed the experimental and theoretical study of the heating and damaging of ruthenium thin films induced by femtosecond laser irradiation. We present the results of an optical pump-probe thermoreflectance experiment with rotating sample allowing to significantly reduce heat accumulation in irradiated spot. We show the evolution of surface morphology from growth of a heat-induced oxide layer at low and intermediate laser fluences to cracking and grooving at high fluences. Theoretical analysis of thermoreflectance in our pump-probe experiment allows us to relate behavior of hot electrons in ruthenium to the Fermi smearing mechanism. This conclusion invites more research on Fermi smearing of transition metals. The analysis of heating is performed with the two-temperature modeling and molecular dynamics simulation, results of which demonstrate that the calculated single-shot melting threshold is higher than experimental damage threshold. We suggest that the onset of Ru film damage is caused by the heat-induced stresses that lead to cracking of the Ru film. Such damage accumulates during repetitive exposure to light.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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