Spectral ellipsometry of binary gratings
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F02%3A00007075" target="_blank" >RIV/61989100:27350/02:00007075 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Spectral ellipsometry of binary gratings
Original language description
The reflection coefficients of 2D periodical structures have been specified and the ellipsometric angels have been computed.
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of JICAST
ISBN
1347-7463
ISSN
—
e-ISSN
—
Number of pages
4
Pages from-to
241-244
Publisher name
Japanese Society of Applied Physics
Place of publication
Tokyo
Event location
Hamamatsu
Event date
Oct 3, 2002
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—