Simulation of Spectroscopic Ellipsometry for Dielectric Lamellar Gratings

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F04%3A00011161" target="_blank" >RIV/61989100:27350/04:00011161 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Simulation of Spectroscopic Ellipsometry for Dielectric Lamellar Gratings

Original language description

The interaction of electromagnetic waves with deep lamellar gratings is described. The mentioned mathematical approach enables to solve and specify the reflection properties of dielectric and absorbing periodical structures.

Czech name

Simulace spektrální elipsometrie dielektrických lamelárních mřížek

Czech description

Simulace spektrální elipsometrie dielektrických lamelárních mřížek

Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

—

Project

<a href="/en/project/ME%20507" target="_blank" >ME 507: Theoretical and experimental research of anisotropic grating structures</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of 2004 International Conference on Mathematical Methods in Electromagnetic Theory

ISBN

—

ISSN

—

e-ISSN

—

Number of pages

4

Pages from-to

501-503

Publisher name

Ukraine Academy of Science

Place of publication

Dnepropetrovsk

Event location

—

Event date

—

Type of event by nationality

—

UT code for WoS article

—