Spectral ellipsometry based on a channeled spectrum detection to measure the thickness of a thin film
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F10%3A86076200" target="_blank" >RIV/61989100:27350/10:86076200 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Spectral ellipsometry based on a channeled spectrum detection to measure the thickness of a thin film
Original language description
We describe a new concept of spectral ellipsometry based on a channeled spectrum detection in a polarimetric configuration with a birefringent crystal to measure the thickness of a thin film.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED0040%2F01%2F01" target="_blank" >ED0040/01/01: Regional materials science and technology centre</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE
ISBN
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ISSN
0277-786X
e-ISSN
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Number of pages
8
Pages from-to
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Publisher name
SPIE-The International Society for Optical Engineering
Place of publication
Bellingham
Event location
Liptovský Ján
Event date
Sep 6, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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