Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27360%2F11%3A86080393" target="_blank" >RIV/61989100:27360/11:86080393 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure
Original language description
Attenuated total reflection (ATR) is widely used in infrared spectral range for measurement of surface properties of solid samples, powders, and liquids. In this paper we use a commercial Fourier-transform infrared (FTIR) spectrometer Vertex 70v from Bruker company equipped with the ATR Golden Gate accessory from Specac. To increase sensitivity of the method we included infrared polarizer and analyzer, which enable measurement of the reflected amplitudes ratio and the phase differences between p- and s-polarizations in the frame of the ATR ellipsometry. Procedure of ellipsometric angles measurement is proposed using data acquisition at several azimuthal angles of polarizers. Spectral dependence of real polarizer extinction ratio, partial polarization of beam coming from the interferometer and polarization sensitivity of infrared detector are presented.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Photonics, Devices, and Systems V : conference proceedings : 24-26 August 2011, Prague, Czech Republic
ISBN
978-0-8194-8953-1
ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
"83060S"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Praha
Event date
Aug 24, 2011
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000297582500028

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