Height profile measurement by means of white light interferometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15410%2F03%3A00001469" target="_blank" >RIV/61989592:15410/03:00001469 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Height profile measurement by means of white light interferometry

Original language description

White light interferometry is an established method for height profile measurement of objects. This method, unlike classical interferometry, can be used for measurement of objects with rough surface which is an important advantage. The white light interferometer with a broad-band light source and a CCD camera as a detector. The Michelson interferometer has the object to be measured in one arm and the reference mirror in the other arm.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

<a href="/en/project/LN00A015" target="_blank" >LN00A015: Research center for optics</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Proceedings of the 13th Polish-Czech-Slovak Optical Conference on Wave and Quantum Aspect of Contemporary Optics

ISSN

0277-786X

e-ISSN

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Volume of the periodical

5259

Issue of the periodical within the volume

N

Country of publishing house

US - UNITED STATES

Number of pages

6

Pages from-to

139-144

UT code for WoS article

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EID of the result in the Scopus database

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