Smart Design of Cz-Ge Crystal Growth Furnace and Process
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985807%3A_____%2F22%3A00567441" target="_blank" >RIV/67985807:_____/22:00567441 - isvavai.cz</a>
Result on the web
<a href="https://dx.doi.org/10.3390/cryst12121764" target="_blank" >https://dx.doi.org/10.3390/cryst12121764</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/cryst12121764" target="_blank" >10.3390/cryst12121764</a>
Alternative languages
Result language
angličtina
Original language name
Smart Design of Cz-Ge Crystal Growth Furnace and Process
Original language description
The aim of this study was to evaluate the potential of the machine learning technique of decision trees to understand the relationships among furnace design, process parameters, crystal quality, and yield in the case of the Czochralski growth of germanium. The ultimate goal was to provide the range of optimal values of 13 input parameters and the ranking of their importance in relation to their impact on three output parameters relevant to process economy and crystal quality. Training data were provided by CFD modelling. The variety of data was ensured by the Design of Experiments method. The results showed that the process parameters, particularly the pulling rate, had a substantially greater impact on the crystal quality and yield than the design parameters of the furnace hot zone. Of the latter, only the crucible size, the axial position of the side heater, and the material properties of the radiation shield were relevant.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10201 - Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Crystals
ISSN
2073-4352
e-ISSN
2073-4352
Volume of the periodical
12
Issue of the periodical within the volume
12
Country of publishing house
CH - SWITZERLAND
Number of pages
17
Pages from-to
1764
UT code for WoS article
000900625400001
EID of the result in the Scopus database
2-s2.0-85144718366