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Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films Via UV Laser Polymerization of Ethynyltrimethylsilane.

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985858%3A_____%2F02%3A27013069" target="_blank" >RIV/67985858:_____/02:27013069 - isvavai.cz</a>

  • Alternative codes found

    RIV/67985858:_____/02:27020051

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Atmospheric Pressure Chemical Vapour Deposition of Polycarbosilane Films Via UV Laser Polymerization of Ethynyltrimethylsilane.

  • Original language description

    ArF laser-induced polymerization of gaseous ethynyltrimethylsilane at atmospheric pressure of He represents a convenient way of efficient chemical vapour deposition of polycarbosilane films. The films are produced at ambient temperature of metals, quartzand glass, and are adhesive to these substrates, which makes this process promising for fabrication of protective coatings on thermally unstable surfaces.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    CH - Nuclear and quantum chemistry, photo chemistry

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/ME%20192" target="_blank" >ME 192: Laser chemistry for production of novel materials</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2002

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    149

  • Issue of the periodical within the volume

    2-3

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    6

  • Pages from-to

    129-134

  • UT code for WoS article

  • EID of the result in the Scopus database