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Micromachined Sensors Based on ZnO Structures and Their Thermo- and Photo-Activated Response to Reducing Gases

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F17%3A00478865" target="_blank" >RIV/68081723:_____/17:00478865 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26220/17:PU139908

  • Result on the web

    <a href="http://dx.doi.org/10.1109/CDE.2017.7905206" target="_blank" >http://dx.doi.org/10.1109/CDE.2017.7905206</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1109/CDE.2017.7905206" target="_blank" >10.1109/CDE.2017.7905206</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Micromachined Sensors Based on ZnO Structures and Their Thermo- and Photo-Activated Response to Reducing Gases

  • Original language description

    ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo- activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 degrees C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    10403 - Physical chemistry

Result continuities

  • Project

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2017

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    2017 SPANISH CONFERENCE ON ELECTRON DEVICES (CDE)

  • ISBN

    978-1-5090-5072-7

  • ISSN

    2163-4971

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

  • Publisher name

    IEEE

  • Place of publication

    New York

  • Event location

    Barcelona

  • Event date

    Feb 8, 2017

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article

    000403327900005