Analysis of the boundaries of ZrO.sub.2./sub. and HfO.sub.2./sub. thin films by atomic force microscopy and the combined optical method.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020023" target="_blank" >RIV/68081731:_____/02:12020023 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Analysis of the boundaries of ZrO.sub.2./sub. and HfO.sub.2./sub. thin films by atomic force microscopy and the combined optical method.
Original language description
In this paper an atomic force microscopy analysis of the microrough upperboundaries of ZrO.sub.2./sub. and HfO.sub.2./sub. thin films is presented. Within this analysis the values of the width, root-mean-square value of heights and power spectral densityfunction of these boundaries are determined for ZrO.sub.2./sub. and HfO.sub.2./sub. exhibiting different thicknesses. The thickness dependences of the quantities mentioned are introduced.The values of the thicknesses of the films are evaluated using thecombined optical method. This optical method is also used to describe boundary microroughness within the effective medium theory. A discussion of the results concerning the microroughness of the upper boundaries of both the ZrO.sub.2./sub. and HfO.sub.2./sub. thin films is also introduced.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and interface analysis
ISSN
0142-2421
e-ISSN
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Volume of the periodical
34
Issue of the periodical within the volume
N/A
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
559-564
UT code for WoS article
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EID of the result in the Scopus database
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