Calculation of the beam profile.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020052" target="_blank" >RIV/68081731:_____/02:12020052 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Calculation of the beam profile.

Original language description

The beam profile provides local current density distribution of a particle beam. From the known distribution we can optimize the axial position of the specimen in a SEM, understand image aberrations or find optimum function of electron or ion analyzers.Graphical plot of the profile as a function of the z coordinate shows what is happening with the beam when it passes through the optical system. The first attempts of graphical presentationof the beam aberrations and profiles based on aberration theory are discussed in the recent diploma thesis.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr.

ISBN

80-238-8986-9

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

19-20

Publisher name

Ústav přístrojové techniky Akademie věd České republiky

Place of publication

Brno

Event location

Skalský dvůr [CZ]

Event date

Jul 8, 2002

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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