High resolution field emission scanning electron microscope JSM 6700 in ISI AS CR Brno - first experience and results with the instrument operation.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020088" target="_blank" >RIV/68081731:_____/02:12020088 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
High resolution field emission scanning electron microscope JSM 6700 in ISI AS CR Brno - first experience and results with the instrument operation.
Original language description
JSM6700F is an ultra high resolution FE SEM suitable for observation of fine structures such as mutilayeres film and nano particles fabricated by the nanotechnology. This JEOL microscope is at ISI ASCR Brno in experimental operation since the beginning of 2002. Its possibilities have been tested on first specimens with submicron structures.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
International summer school: Role of physics in future applications: from nanotechnology to macroelectronics.
ISBN
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ISSN
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e-ISSN
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Number of pages
18
Pages from-to
"X1"-"X5"
Publisher name
VUT
Place of publication
Tři Studně
Event location
Tři Studně [CZ]
Event date
Jun 10, 2002
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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