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Auger electron spectro-microscopy.

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030049" target="_blank" >RIV/68081731:_____/03:12030049 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26220/03:PU36507

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Auger electron spectro-microscopy.

  • Original language description

    The short escape depth of Auger electrons, the high lateral resolution, the chemical information about superficial elemental composition and the possibility of measuring the indepth distribution of elements (with utilisation of the ion sputtering) are the main advantages of the Auger electron spectroscopy (AES). When combined with the scanning electron miscroscope, AES can provide with image signal suitable for spectro-micrographs showing distribution of elements over the surface, i.e. the chemical mapping. This mapping can be advantageously compared with other SEM image signals in order to faciliate their interpretation.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2003

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the 9th Conference and Competition Student EEICT 2003 - Papers written by postgraduate students.

  • ISBN

    80-214-2379-X

  • ISSN

  • e-ISSN

  • Number of pages

    5

  • Pages from-to

    450-454

  • Publisher name

    Brno University of Technology

  • Place of publication

    Brno

  • Event location

    Brno [CZ]

  • Event date

    Apr 24, 2003

  • Type of event by nationality

    CST - Celostátní akce

  • UT code for WoS article