Metrological SPM with positioning controlled by green light interferometry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335626" target="_blank" >RIV/68081731:_____/09:00335626 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/09:#0000356
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Metrological SPM with positioning controlled by green light interferometry
Original language description
Laser interferometry seems to be a solution not only due to its direct traceability to the fundamental etalon of length but also the incremental interferometer in its fringe counting mode gives an excellent dynamic range limited only by the fluctuationsof the refractive index of air and offers nanometer or even subnanometer resolution over large range. We concentrated onto a small range flexture three-axis nanopositioning stage equipped with closed-loop motion control with capacitive sensors embedded in a frame with six-axes interferometric system supplied from a stabilized single-frequency frequency doubled 532 nm Nd:YAG laser.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Fringe 2009 - 6th International Workshop on Advanced Optical Metrology
ISBN
978-3-642-03050-5
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
Springer
Place of publication
Heidelberg
Event location
Nürtinger
Event date
Sep 13, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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