Modification of the Schottky FE ZrO/W electron emitter

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352423" target="_blank" >RIV/68081731:_____/10:00352423 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Modification of the Schottky FE ZrO/W electron emitter
Original language description
A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based onthe principle of point projection.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 17th IFSM International Microscopy Congress
ISBN
978-85-63273-06-2
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Sociedade Brasileira de Microscopia e Microanilise
Place of publication
Rio de Janeiro
Event location
Rio de Janeiro
Event date
Sep 19, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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