Differential interferometry with suppression of the influence of refractive index of air for nanometrology

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00385783" target="_blank" >RIV/68081731:_____/12:00385783 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Differential interferometry with suppression of the influence of refractive index of air for nanometrology
Original language description
We present an interferometric technique based on differential interferometry setup for measurement in the subnanometer scale in atmospheric conditions. The motivation for development of this ultraprecise technique is coming from the field of nanometrology. The key limiting factor in any optical measurement are fluctuations of the refractive index of air representing a source of uncertainty on the 1*E-6 level when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is basedon the concept of overdetermined interferometric setup where a reference length is derived from a mechanical frame made from a material with very low thermal coefficient on the 1*E-8 level. The technique allows to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while
Czech name
—
Czech description
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
NANOCON 2012, 4th International Conference Proceedings
ISBN
978-80-87294-32-1
ISSN
—
e-ISSN
—
Number of pages
6
Pages from-to
805-810
Publisher name
TANGER Ltd
Place of publication
Ostrava
Event location
Brno
Event date
Oct 23, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—

Similar results(10)