Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F13%3A00421237" target="_blank" >RIV/68081731:_____/13:00421237 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2020756" target="_blank" >http://dx.doi.org/10.1117/12.2020756</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2020756" target="_blank" >10.1117/12.2020756</a>

Result language
angličtina
Original language name
Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method
Original language description
In scanning probe microscopy laser interferometers are usually used for measuring the position of the probe tip with a metrological traceability. As the most of the AFM setups are designed to work under standard atmospheric conditions the changes of therefractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. In order to achieve better accuracies the refractive index of air has to be monitored continuously and its instantaneous value has to be used for compensating the lengths measured by all of the interferometric axes. In the presented work we developed a new concept of an electronic unit which is able to monitor the refractive index of air on basis of measurement of ambient atmospheric conditions: temperature, humidity, pressure of the air and the CO2 concentration. The data processing is based on Ciddor equation for calculating the refractive index of air. The important advantage of the unit is a very low power consumption of the electr
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical Measurement Systems for Industrial Inspection VIII (Proceedings of SPIE Vol. 8788)
ISBN
978-0-8194-9604-1
ISSN
—
e-ISSN
—
Number of pages
9
Pages from-to
"878837:1"-"9"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Munich
Event date
May 13, 2013
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000323493700104

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