Computations in Charged Particle Optics
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00431219" target="_blank" >RIV/68081731:_____/14:00431219 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Computations in Charged Particle Optics
Original language description
The design of modern electron microscopes could not be possible without appropriate software tools. With the sub-nanometer resolution in SEM, and the sub-?ngström resolution in TEM, one can see that the simulations involved in designing the instruments need to be tremendously accurate. A simulation starts with the computation of the electric and magnetic fields generated by various optical elements. That is followed by determinig the paraxial properties, aberrations and accurate particle trajectories (ray tracing). The distributions of the fields are mostly detemined with the Finite Element Method (FEM), the Boundary Element Method (BEM) or the Finite Difference Method (FDM). As the field data are at the input of all the subsequent calculations, they need to be very accurate, especially in the region close to the optical axis. Current expertise includes a set of rules that need to be applied in generating a FEM or BEM mesh. Advanced field interpolation techniques are necessary for accu
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/EE.2.3.20.0103" target="_blank" >EE.2.3.20.0103: Support for human resources and transfer of knowledge in conditions of international cooperation of research teams</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Workshop of Interesting Topics of SEM and ESEM
ISBN
978-80-87441-12-1
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
23-24
Publisher name
Institute of Scientific Instruments AS CR, v. v. i
Place of publication
Brno
Event location
Mikulov
Event date
Aug 26, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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