Innovation possibilities of scintillation electron detector for SEM

Result code in IS VaVaI
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Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Innovation possibilities of scintillation electron detector for SEM
Original language description
To evaluate performance of a scintillation detection system for SEM, it is necessary to consider many scintillator parameters. Various attributes of the scintillator for the SEM electron detector are listed in. The very important parameters are those affecting the detective quantum efficiency (DQE) which is primarily a measure of image noise. Not a less important indicator of image quality is the modulation transfer function (MTF) which describes the ability to show fine image details. Therefore, usinga scanning imaging system, the detector bandwidth, which is given especially by the scintillator decay time, is the key to the good MTF. Currently, the YAG:Ce single crystal scintillator (introduced already in 1978 having somewhat limiting decay characteristic is the most frequently used scintillator in the SEM. The aim of this paper is to outline possibilities of scintillator innovation to get the improved MTF and DQE.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
18th International Microscopy Congres. Proceedings
ISBN
978-80-260-6720-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Czechoslovak Microscopy Society
Place of publication
Praha
Event location
Praha
Event date
Sep 7, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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