Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F15%3A00451582" target="_blank" >RIV/68081731:_____/15:00451582 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1017/S1431927615013392" target="_blank" >http://dx.doi.org/10.1017/S1431927615013392</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1017/S1431927615013392" target="_blank" >10.1017/S1431927615013392</a>
Alternative languages
Result language
angličtina
Original language name
Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope
Original language description
A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 pím2.
Czech name
—
Czech description
—
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
—
Result continuities
Project
<a href="/en/project/LO1212" target="_blank" >LO1212: ALISI - Centre of advanced diagnostic methods and technologies</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Microscopy and Microanalysis
ISSN
1431-9276
e-ISSN
—
Volume of the periodical
21
Issue of the periodical within the volume
S4
Country of publishing house
US - UNITED STATES
Number of pages
6
Pages from-to
212-217
UT code for WoS article
—
EID of the result in the Scopus database
—