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Simulation of Space Charge Effects in Electron Optical System Based on the Calculations of Current Density

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F15%3A00451588" target="_blank" >RIV/68081731:_____/15:00451588 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1017/S1431927615013458" target="_blank" >http://dx.doi.org/10.1017/S1431927615013458</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1017/S1431927615013458" target="_blank" >10.1017/S1431927615013458</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Simulation of Space Charge Effects in Electron Optical System Based on the Calculations of Current Density

  • Original language description

    We present a numerical method for iterative computation of electron optical systems influenced by space charge with an improved accuracy in the same calculation time. We replace the common algorithm for evaluating the space charge distribution with a newone based on the calculation of the current density distribution from an aberration polynomial. We introduce a re-meshing algorithm which adapts the mesh used for the field calculation by the finite element method in each iteration to the actual space charge distribution to keep it sufficiently fine in all areas with non-zero space charge.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LO1212" target="_blank" >LO1212: ALISI - Centre of advanced diagnostic methods and technologies</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2015

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Microscopy and Microanalysis

  • ISSN

    1431-9276

  • e-ISSN

  • Volume of the periodical

    21

  • Issue of the periodical within the volume

    S4

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    6

  • Pages from-to

    246-251

  • UT code for WoS article

  • EID of the result in the Scopus database