Correction of misalignment aberrations of a hexapole corrector using the differential algebra method

Result code in IS VaVaI

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Result on the web

<a href="http://www.trends.isibrno.cz/" target="_blank" >http://www.trends.isibrno.cz/</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Correction of misalignment aberrations of a hexapole corrector using the differential algebra method

Original language description

Overcoming the limitations of the Schertzer theorem is a long story in electron microscopy. Although the basic principle of a spherical aberration (C3) correction was suggested as early as in 1947 the first experimental correctors of spherical aberration were only realized in the last decade of the 20th century. The recent multipole correctors are designed for high-energynTEM or STEM, where the corrector system enables reaching the atomic resolution. On the othernhand, the corrector for low-energy SEM has been developed but this type of corrector must also contain chromatic aberration (Cc) correction to reduce the effect of the non-zero energy width. Recently, the energies of SEM reach 30 keV and transmission mode (TSEM) is a standard part of the instrument. Standard resolution in TSEM is about 0.6 nm and it is limited by C3. Reaching atomic resolution with this set-up is not a real expectation because of its instability, but the resolution of about 0.2 nm would increase the field of applications. Corrector for these type of instruments should be (a) simple, compact and cheap (b) only spherical aberration of the third,noptionally the fifth order must be corrected (c) effect of the chromatic aberration may be reduced by energy filtering. We studied design based on Rose’s hexapole corrector.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2016

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

ISBN

978-80-87441-17-6

ISSN

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e-ISSN

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Number of pages

4

Pages from-to

50-53

Publisher name

Institute of Scientific Instruments CAS

Place of publication

Brno

Event location

Skalský dvůr

Event date

May 29, 2016

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000391254000023