Quantitative comparison of simulated and measured signals in the STEM mode of a SEM

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F18%3A00489596" target="_blank" >RIV/68081731:_____/18:00489596 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.nimb.2017.10.034" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2017.10.034</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2017.10.034" target="_blank" >10.1016/j.nimb.2017.10.034</a>

Result language

angličtina

Original language name

Quantitative comparison of simulated and measured signals in the STEM mode of a SEM

Original language description

The transmission of electrons with energies 15 keV and 30 keV through Si and Au films of 100 nm thickness each have been studied in a Scanning Transmission Electron Microscope. The electrons that were transmitted through the films were detected using a multi-annular photo-detector consisting of a central Bright Field (BF) and several Dark Field (DF) detectors. For the experiment the detector was gradually offset from the axis and the signal from the central BF detector was studied as a function of the offset distance and compared with MC simulations. The experiment showed better agreement between experiment and several different MC simulations as compared to previous results, but differences were still found particularly for low angle scattering from Si. Data from Au suggest that high energy secondary electrons contribute to the signal on the central BF detector for low primary beam energies, when the STEM detector is in its usual central position.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20506 - Coating and films

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

—

Volume of the periodical

415

Issue of the periodical within the volume

JAN

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

8

Pages from-to

17-24

UT code for WoS article

000424309000003

EID of the result in the Scopus database

2-s2.0-85033458029