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Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F20%3A00536751" target="_blank" >RIV/68081731:_____/20:00536751 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1364/DH.2020.HTh5H.2" target="_blank" >http://dx.doi.org/10.1364/DH.2020.HTh5H.2</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1364/DH.2020.HTh5H.2" target="_blank" >10.1364/DH.2020.HTh5H.2</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

  • Original language description

    We compare three focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. The laser beam was modulated by three specific computer-generated holograms displayed on a spatial light modulator.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Imaging and Applied Optics Congress. Proceedings

  • ISBN

    978-1-943580-77-4

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

  • Publisher name

    OSA

  • Place of publication

    Washington

  • Event location

    Washington

  • Event date

    Jun 22, 2020

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article