Compact differential plane interferometer with in-axis mirror tilt detection
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F21%3A00543086" target="_blank" >RIV/68081731:_____/21:00543086 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0143816621000385" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0143816621000385</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.optlaseng.2021.106568" target="_blank" >10.1016/j.optlaseng.2021.106568</a>
Alternative languages
Result language
angličtina
Original language name
Compact differential plane interferometer with in-axis mirror tilt detection
Original language description
Besides the environmental fluctuations, the typical sources of significant uncertainty in the laser interferometry systems are the geometrical errors. These are stemming, among others, from the misalignment of measurement axes, the thermo-mechanical influences of the system components and the mounting, guidance errors of the translation mechanism that carries the measurement mirror or vibrations. We report on a compact double-pass differential plane interferometer that features an original optical arrangement with four parallel and coplanar beams, where the beam pairs in the two arms are coaxial. The differential arrangement minimizes the dead path and shortens the metrological loop so that the sensitivity to thermal drifts and vibrations is reduced. The arm symmetry allows for the preservation of the Abbe principle, and the common path mitigates the influences of the environmental disturbances. The interferometer optics is designed as a self-contained single-piece assembly made using optical contacting from the low-expansion materials. The interferometer system integrates the homodyne receiver (even though the optical arrangement is well-suited for heterodyne detection too) and also a tilt-detection electronics that allows for detection of pitch and roll of the interferometer mirror so that the parasitic movement of the measuring mirror could be compensated for. The experimental characterization revealed a good optical performance of the interferometer with sub-nanometre cyclic error and the resolution of tilt detection in order of a few microradians.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optics and Lasers in Engineering
ISSN
0143-8166
e-ISSN
1873-0302
Volume of the periodical
141
Issue of the periodical within the volume
June
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
8
Pages from-to
106568
UT code for WoS article
000640984000014
EID of the result in the Scopus database
2-s2.0-85100770198