Study of Dielectric Nanolayers and Multilayer Coated Emitters

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F23%3A00574102" target="_blank" >RIV/68081731:_____/23:00574102 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26220/23:PU148850
Result on the web
<a href="https://ieeexplore.ieee.org/document/10188949" target="_blank" >https://ieeexplore.ieee.org/document/10188949</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/IVNC57695.2023.10188949" target="_blank" >10.1109/IVNC57695.2023.10188949</a>

Result language
angličtina
Original language name
Study of Dielectric Nanolayers and Multilayer Coated Emitters
Original language description
We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3, HfO2, which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.
Czech name
—
Czech description
—

Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)
ISBN
979-8-3503-0143-4
ISSN
2164-2370
e-ISSN
—
Number of pages
2
Pages from-to
53-54
Publisher name
IEEE
Place of publication
New York
Event location
Cambridge, MA
Event date
Jul 10, 2023
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
001042193300019

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