The Relation Between the Electron Backscattering Coefficients and Elastic Peak Intensity for C, Si, Cu, Ag, and Au at Low Energy Range
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F24%3A00617421" target="_blank" >RIV/68081731:_____/24:00617421 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/document/10652360" target="_blank" >https://ieeexplore.ieee.org/document/10652360</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/IVNC63480.2024.10652360" target="_blank" >10.1109/IVNC63480.2024.10652360</a>
Alternative languages
Result language
angličtina
Original language name
The Relation Between the Electron Backscattering Coefficients and Elastic Peak Intensity for C, Si, Cu, Ag, and Au at Low Energy Range
Original language description
This study compares the backscattered electron coefficient (eta) with the elastically scattered electrons coefficient (epsilon) for the increasingly used low electron beam energies in microscopy, low voltage electron microscopy (LVSEM) and low energy scanning electron microscopy (SLEEM/LEEM). The backscattering factor has been an extensively studied and used property of materials across the periodic table and at various beam energies. epsilon, however, has also been extensively used as material property but only at relatively low incident electron beam energies, and mostly in surface analysis where the material studied is under ultra-high vacuum conditions, unlike eta which is mostly used or studied under high vacuum environment. Both eta and epsilon were theoretically calculated using the Monte Carlo model based on the Geant 4 library and tools. These calculations were carried out for C, Si, Cu, Ag, and Au for electron beam energies in the range of 100 eV to 1 keV. The backscattering coefficient in this electron energy range is found to exhibit intriguing properties. Furthermore, the results indicate a direct relationship between eta and epsilon.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024
ISBN
979-8-3503-7977-8
ISSN
2164-2370
e-ISSN
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Number of pages
2
Pages from-to
158-159
Publisher name
IEEE
Place of publication
New York
Event location
Brno
Event date
Jul 15, 2024
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
001310530600023