Height profile measurement by means of white-light interferometry.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F03%3A02030180" target="_blank" >RIV/68378271:_____/03:02030180 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Height profile measurement by means of white-light interferometry.
Original language description
White-light interferometry is an established method for the height-profile measurement of rough surface. we show the results of the heigh-profile measurement of silicon waters.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LN00A015" target="_blank" >LN00A015: Research center for optics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Engineering Mechanics 2003.
ISBN
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ISSN
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e-ISSN
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Number of pages
7
Pages from-to
1-7
Publisher name
Institut of Theoretical and Applied Mechanics ASCR, Prague
Place of publication
Žd'ár nad Sázavou
Event location
Svratka [CZ]
Event date
May 12, 2003
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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