Growth of nanocrystalline diamond films deposited by microwave plasma CVD system at low substrate temperatures

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F06%3A00053263" target="_blank" >RIV/68378271:_____/06:00053263 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Growth of nanocrystalline diamond films deposited by microwave plasma CVD system at low substrate temperatures

Original language description

Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen-based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100C

Czech name

Růst nanokrystalických diamantových MW CVD vrstev při nízké teplotě podložky

Czech description

Nanokrystalické diamantové filmy pěstované při teplotě 370-1100C

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2006

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica Status Solidi. A

ISSN

0031-8965

e-ISSN

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Volume of the periodical

203

Issue of the periodical within the volume

12

Country of publishing house

DE - GERMANY

Number of pages

5

Pages from-to

3011-3015

UT code for WoS article

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EID of the result in the Scopus database

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