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Influence of surface roughness on the measurement uncertainty of white-light interferometry

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F08%3A00340918" target="_blank" >RIV/68378271:_____/08:00340918 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Influence of surface roughness on the measurement uncertainty of white-light interferometry

  • Original language description

    White-light interferometry measuring on rough surface does not resolve the lateral structure of the surface. Consequently the phase of the interferogram becomes a random variable. Therefore in white-light interferometry on rough surface, the phase is notevaluated and the zero path difference is determined by seeking the maximal contrast of the interference fringes. In this way the rough surface gives rise to a measurement error.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/KAN301370701" target="_blank" >KAN301370701: Nanostructured Macroscopic Systems - Technology and Characterisation</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2008

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics

  • ISBN

    978-0-8194-7383-7

  • ISSN

  • e-ISSN

  • Number of pages

    8

  • Pages from-to

  • Publisher name

    SPIE - The International Society for Optical Engineering

  • Place of publication

    Bellingham

  • Event location

    Polanica Zdrój

  • Event date

    Sep 8, 2008

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article