Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F11%3A00359322" target="_blank" >RIV/68378271:_____/11:00359322 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1364/OE.19.000193" target="_blank" >http://dx.doi.org/10.1364/OE.19.000193</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.19.000193" target="_blank" >10.1364/OE.19.000193</a>
Alternative languages
Result language
angličtina
Original language name
Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources
Original language description
We investigated the damage mechanism of MoN/SiN multilayer XUV optics under two extreme conditions: thermal annealing and irradiation with single shot intense XUV pulses from the free-electron laser facility in Hamburg - FLASH. The damage was studied "post-mortem" by means of X-ray diffraction, interference-polarizing optical microscopy, atomic force microscopy, and scanning transmission electron microscopy. Although the timescale of the damage processes and the damage threshold temperatures were different (in the case of annealing it was the dissociation temperature of Mo2N and in the case of XUV irradiation it was the melting temperature of MoN) the main damage mechanism is very similar: molecular dissociation and the formation of N-2, leading to bubbles inside the multilayer structure.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optics Express
ISSN
1094-4087
e-ISSN
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Volume of the periodical
19
Issue of the periodical within the volume
1
Country of publishing house
US - UNITED STATES
Number of pages
13
Pages from-to
193-205
UT code for WoS article
000285915300031
EID of the result in the Scopus database
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