Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F11%3A00364639" target="_blank" >RIV/68378271:_____/11:00364639 - isvavai.cz</a>
Alternative codes found
RIV/61388998:_____/11:00364639 RIV/68407700:21460/11:00187587
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.01.038" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.01.038</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.01.038" target="_blank" >10.1016/j.surfcoat.2011.01.038</a>

Result language
angličtina
Original language name
Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation
Original language description
Elastic properties of diamond-like carbon (DLC) layers with gradient carbon?silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic inplane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
<a href="/en/project/GA101%2F09%2F0702" target="_blank" >GA101/09/0702: Mechanical properties of functional surface layers of submicron thicknesses</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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