Novel plasma treatment in linear antenna microwave PECVD system

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00377792" target="_blank" >RIV/68378271:_____/12:00377792 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21340/12:00175420

Result on the web

<a href="http://dx.doi.org/10.1016/j.vacuum.2011.07.055" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2011.07.055</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2011.07.055" target="_blank" >10.1016/j.vacuum.2011.07.055</a>

Result language

angličtina

Original language name

Novel plasma treatment in linear antenna microwave PECVD system

Original language description

This work reports on hydrogen termination of nano-crystalline diamond films and the behavior of polymer SU-8 as passivating layer after plasma treatment performed at low temperature in a novel linear antenna microwave plasma enhanced system. Nano-crystalline diamond films were grown by microwave plasma enhanced chemical vapor deposition and then hydrogen terminated at different substrate temperatures.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Vacuum

ISSN

0042-207X

e-ISSN

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Volume of the periodical

86

Issue of the periodical within the volume

6

Country of publishing house

GB - UNITED KINGDOM

Number of pages

5

Pages from-to

603-607

UT code for WoS article

000301018400006

EID of the result in the Scopus database

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