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Performances of microwave plasma generation in linear antenna configuration

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00424334" target="_blank" >RIV/68378271:_____/13:00424334 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Performances of microwave plasma generation in linear antenna configuration

  • Original language description

    The versatility of linear antenna MW plasma system for growth of carbon allotropes was previously shown. Utilization of commercially available deposition systems brings advantages of strong technological background, cost effectiveness and usually easy further up-scaling. On the other hand, these systems need special modifications and deeper understanding of ongoing processes when used for scientific research. In this article we studied the behavior of plasma generation by two independent pulsed MW generators. We have shown how to overcome a problem of missing trigger outputs from the pulsed MW generators for realization of time resolved measurements. We have also shown that in the studied system exist the 33 min period during which originally synchronized pulses detune each from other and synchronize back creating also an interval of time when plasma does not extinguish.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2013

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies)

  • ISBN

    978-80-971179-2-4

  • ISSN

  • e-ISSN

  • Number of pages

    5

  • Pages from-to

    42-46

  • Publisher name

    Slovenská vákuová spoločnosť

  • Place of publication

    Bratislava

  • Event location

    Štrbské Pleso

  • Event date

    Oct 10, 2013

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article