Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00431530" target="_blank" >RIV/68378271:_____/14:00431530 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1002/pssb.201451041" target="_blank" >http://dx.doi.org/10.1002/pssb.201451041</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssb.201451041" target="_blank" >10.1002/pssb.201451041</a>
Alternative languages
Result language
angličtina
Original language name
Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering
Original language description
Amorphous silicon carbonitride (a-SiCxNy) thin films deposited on the SiO2 substrates by reactive magnetron sputtering was studied by Raman and electron paramagnetic resonance (EPR) spectroscopy. Raman analysis indicates the presence of C?N, Si?N, C?C bonds in a-SiCxNy films. Three EPR signals were revealed in a-SiCxNy/SiO2. One of them with g=2.0033 was attributed to the carbon-dangling bonds (CDB). Based on the lineshape and linewidth, the EPR signal was attributed to the unpaired electron delocalizedover sp2 carbon cluster. With the increase of nitrogen (N) content, the spin density of CDB significantly increases. From the temperature dependence of the linewidth and integral intensity of the CDB EPR signal, it was concluded that the antiferromagnetic ordering occurs in spin system. The antiferromagnetic exchange constant between CDBs was found.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi B-Basic Solid State Physics
ISSN
0370-1972
e-ISSN
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Volume of the periodical
251
Issue of the periodical within the volume
6
Country of publishing house
DE - GERMANY
Number of pages
8
Pages from-to
1178-1185
UT code for WoS article
000337608600007
EID of the result in the Scopus database
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