Measurement of Young?s modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00433721" target="_blank" >RIV/68378271:_____/14:00433721 - isvavai.cz</a>
Result on the web
<a href="http://scitation.aip.org/content/aip/journal/apl/104/8/10.1063/1.4866417" target="_blank" >http://scitation.aip.org/content/aip/journal/apl/104/8/10.1063/1.4866417</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4866417" target="_blank" >10.1063/1.4866417</a>

Result language
angličtina
Original language name
Measurement of Young?s modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors
Original language description
By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young?s modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, theparticle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Project
<a href="/en/project/GAP107%2F12%2F0800" target="_blank" >GAP107/12/0800: Fatigue of NiTiX High Temperature Shape Memory Alloy Actuators /FACT/</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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