Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00435932" target="_blank" >RIV/68378271:_____/14:00435932 - isvavai.cz</a>
Alternative codes found
RIV/61389005:_____/14:00435932 RIV/68407700:21460/14:00222724
Result on the web
<a href="http://dx.doi.org/10.1002/pssa.201431255" target="_blank" >http://dx.doi.org/10.1002/pssa.201431255</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.201431255" target="_blank" >10.1002/pssa.201431255</a>
Alternative languages
Result language
angličtina
Original language name
Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
Original language description
In this work, we show that an ultra nano-crystalline diamond (UNCD) type of morphology can be prepared upon N2 addition to H2[BOND]CO2[BOND]CH4 plasmas at low pressures (0.3?mbar) and low temperature (520?°C); however, these films despite their UNCD character show sp3 dominated Raman spectra and highly isolating behavior. The crystalline structure and morphology of the films were characterized by scanning electron microscopy, atomic force microscopy, Raman spectroscopy, grazing angle X-ray diffraction,and transmission electron microscopy. Diamond films' composition was evaluated from thermal neutron depth profiling. Films were also characterized by photoluminescence spectroscopy to study the incorporation of luminescent NV centre. Addition of nitrogenincreases deposition rate and dramatically changes surface morphology and crystalline structure from well faceted diamond crystals to UNCD like morphology.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi. A
ISSN
1862-6300
e-ISSN
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Volume of the periodical
211
Issue of the periodical within the volume
10
Country of publishing house
DE - GERMANY
Number of pages
6
Pages from-to
2296-2301
UT code for WoS article
000344241100014
EID of the result in the Scopus database
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