Interaction of Extreme Ultraviolet Laser Radiation with Solid Surface: Ablation, Desorption, Nanostructuring

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00436689" target="_blank" >RIV/68378271:_____/14:00436689 - isvavai.cz</a>
Alternative codes found
RIV/61389021:_____/14:00436689
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Interaction of Extreme Ultraviolet Laser Radiation with Solid Surface: Ablation, Desorption, Nanostructuring
Original language description
Předneseno na:International Symposium on High Power Laser Systems and Applications/20./,Chengdu,25.-29.08.2014,Čína, The area, where interaction of focused XUV laser radiation with solid surface takes place, can be divided according to local fluency intodesorption region (if fluency is larger than zero and smaller than ablation threshold) and ablation region (if fluency is equal or larger than this threshold). It turned out that a direct nanostructuring (e.g. imprinting diffraction pattern created on edges of windows of proximity standing grid) is possible in the desorption region only. While for femtosecond pulses the particle (atom/molecule) removal-efficiency in the desorption region is very small ( < 10%), and hence, it can be easily distinguishedfrom the ablation region with 100%, for nanosecond pulses in desorption region this rises at easily ablated materials from 0% at the periphery up to 90% at the ablation contour and, therefore, the boundary between these two
Czech name
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Czech description
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Project
<a href="/en/project/GA14-29772S" target="_blank" >GA14-29772S: Surface nanostructuring by extreme ultraviolet and X-ray laser radiation</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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