Laser micromachining of glass, silicon, and ceramics

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00449555" target="_blank" >RIV/68378271:_____/15:00449555 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1155/2015/584952" target="_blank" >http://dx.doi.org/10.1155/2015/584952</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1155/2015/584952" target="_blank" >10.1155/2015/584952</a>

Result language

angličtina

Original language name

Laser micromachining of glass, silicon, and ceramics

Original language description

A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. Thismethod is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JP - Industrial processes and processing

OECD FORD branch

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Project

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Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Advances in Materials Science and Engineering

ISSN

1687-6822

e-ISSN

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Volume of the periodical

2015

Issue of the periodical within the volume

Feb

Country of publishing house

US - UNITED STATES

Number of pages

6

Pages from-to

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UT code for WoS article

000355113200001

EID of the result in the Scopus database

2-s2.0-84925610133