In situ XPS characterization of diamond films after AR+ cluster ion beam sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00452710" target="_blank" >RIV/68378271:_____/15:00452710 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

In situ XPS characterization of diamond films after AR+ cluster ion beam sputtering

Original language description

In this work, in situ XPS analysis of chemical composition of H- and O-terminated nano- and microcrystalline diamond (NCD and MCD) films before and after their sputtering by the Ar+ cluster ion beam was investigated. Scanning electron microscopy confirmed sputtering of all diamond surfaces with a rate about 0.5 nm/min. Raman spectroscopy and XPS revealed surface graphitization of diamond surface induced by sputtering. Moreover, XPS data showed the presence of about 0.7 % of Ar atoms on the investigated diamond surface after 66 min of sputtering. Also, oxygen residuals were still presented on the H-NCD surface after 66 min of sputtering. In contrast, no oxygen was found on the H-MCD surface just after 2 min of sputtering. Surface composition is discussed in respect to the diamond films growth parameters and surface structure.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/GA15-01687S" target="_blank" >GA15-01687S: Allotropes of carbon: microbiological studies</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

NANOCON 2015: 7th International Conference on Nanomaterials - Research and Application, Conference Proceedings

ISBN

978-80-87294-63-5

ISSN

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e-ISSN

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Number of pages

6

Pages from-to

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Publisher name

TANGER, spol. s r.o.

Place of publication

Ostrava

Event location

Brno

Event date

Oct 14, 2015

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

000374708800105