Crystalline thin layers of BaTiO3 for gas sensors prepared by PLD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00501097" target="_blank" >RIV/68378271:_____/18:00501097 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1007/978-94-024-1298-7_2" target="_blank" >http://dx.doi.org/10.1007/978-94-024-1298-7_2</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/978-94-024-1298-7_2" target="_blank" >10.1007/978-94-024-1298-7_2</a>
Alternative languages
Result language
angličtina
Original language name
Crystalline thin layers of BaTiO3 for gas sensors prepared by PLD
Original language description
The synthesis of BaTiO3 thin films for gas detectors was studied. Thin layers of BaTiO3 (BTO) were deposited by pulsed laser deposition (PLD) on fused silica and Si (100) substrates using various deposition conditions from a sintered BaTiO3 target. The energy density of a KrF excimer laser was in the range from 2 to 6 Jcm 2. Films were deposited in an O2 ambient in the range from 10 3 to 10 Pa. The films were prepared at substrate temperatures ranging from 500 to 980 C. Polycrystalline BTO was obtained at substrate temperatures above 670 C. With increasing deposition temperature above 700 C the formation of the unwanted rutile phase prevented the growth of perovskite ferroelectric BTO. Concurrently, with decreasing substrate temperature below 670 C, amorphous films were formed. The layers was characterized by XRD spectroscopy and AFM microscopy. We optimized the depositions condition of the layers for chemical sensors.n
Czech name
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Czech description
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Classification
Type
C - Chapter in a specialist book
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/GA15-05864S" target="_blank" >GA15-05864S: Biocompatibility of doped DLC layers prepared by hybrid laser technology</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Book/collection name
Advanced nanotechnologies for detection and defence against CBRN agents
ISBN
978-9402412970
Number of pages of the result
19
Pages from-to
17-30
Number of pages of the book
512
Publisher name
Springer International Edition
Place of publication
Cham
UT code for WoS chapter
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