On the origin of multilayered structure of W-B-C coating prepared by nonreactive magnetron sputtering from a single segmented target

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00517506" target="_blank" >RIV/68378271:_____/19:00517506 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2019.07.077" target="_blank" >https://doi.org/10.1016/j.surfcoat.2019.07.077</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2019.07.077" target="_blank" >10.1016/j.surfcoat.2019.07.077</a>

Result language
angličtina
Original language name
On the origin of multilayered structure of W-B-C coating prepared by nonreactive magnetron sputtering from a single segmented target
Original language description
This study describes a multilayered structure of W-B-C coatings deposited by non-reactive sputtering of a single target chemical composition of a coating and its deposition rate are very sensitive to the substrate position in the chambre, due to different transport pathways of heavy (W) and light (C and B) atoms sputtered from the same target, but differently scattered by the working argon gas.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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