Flexoelectricity in polycrystalline TiO2 thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00536708" target="_blank" >RIV/68378271:_____/20:00536708 - isvavai.cz</a>
Result on the web
<a href="http://hdl.handle.net/11104/0314434" target="_blank" >http://hdl.handle.net/11104/0314434</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.actamat.2020.03.018" target="_blank" >10.1016/j.actamat.2020.03.018</a>
Alternative languages
Result language
angličtina
Original language name
Flexoelectricity in polycrystalline TiO2 thin films
Original language description
he flexoelectric effect describes the electromechanical coupling of a strain gradient to a polarization and vice versa. The flexoelectric effect has not been established in today`s M/NEMS device architectures as other transducer principles. In this work, values of the converse flexoelectric coefficient for titanium dioxide (TiO2) are provided. The experimental results are based on characterization of IrO2/TiO2/IrO2 cantilevers. TiO2 is selected as functional thin film material as it offers a very high permittivity and shows no hysteresis or saturation effects as it is neither ferro- nor paraelectric. TiO2 guarantees a low cost, lead-free realization and can be directly integrated in a standard silicon MEMS fabrication process by sputter deposition. The flexoelectric coefficient is shown to be µeff = 1.78 ± 0.16 nC m−1 at 10 kHz. The flexoelectric coupling constant with a value of 2.75 V is in good agreement with that theoretically predicted by Kogan`s estimate of 3.14 V.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Acta Materialia
ISSN
1359-6454
e-ISSN
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Volume of the periodical
190
Issue of the periodical within the volume
May
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
124-129
UT code for WoS article
000527831400012
EID of the result in the Scopus database
2-s2.0-85083311903