In-situ plasma monitoring by optical emission spectroscopy during pulsed laser deposition of doped Lu2O3
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00546180" target="_blank" >RIV/68378271:_____/21:00546180 - isvavai.cz</a>
Alternative codes found
RIV/60461373:22340/21:43922953
Result on the web
<a href="https://doi.org/10.1007/s00340-021-07689-4" target="_blank" >https://doi.org/10.1007/s00340-021-07689-4</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s00340-021-07689-4" target="_blank" >10.1007/s00340-021-07689-4</a>
Alternative languages
Result language
angličtina
Original language name
In-situ plasma monitoring by optical emission spectroscopy during pulsed laser deposition of doped Lu2O3
Original language description
The control and arguably the tailoring aspect of technologies like pulsed laser deposition (PLD) rises from understanding the chemistry hidden by the laser generated plasma. With the continuous transition towards thin films with complex structures and geometries, the comprehension of the fundamental processes during the film deposition becomes critical. During the PLD of Mo and Eu-doped Lu2O3, optical emission spectroscopy was implemented for in-situ plasma monitoring. The spatial distribution of individual elements revealed the structuring of a stoichiometric plasma while the formation of LuO molecule within the plasma plume is seen as being induced by the addition of a minimum 1 Pa of O2. The energy of the ejected particles was controlled through doping and O2 pressure.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Physics B-Lasers and Optics
ISSN
0946-2171
e-ISSN
1432-0649
Volume of the periodical
127
Issue of the periodical within the volume
10
Country of publishing house
DE - GERMANY
Number of pages
9
Pages from-to
140
UT code for WoS article
000696523600001
EID of the result in the Scopus database
2-s2.0-85115095563