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Formation of tubular structures and microneedles on silicon surface by doughnut-shaped ultrashort laser pulses

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00557026" target="_blank" >RIV/68378271:_____/22:00557026 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216208:11320/22:10447260

  • Result on the web

    <a href="https://doi.org/10.1016/j.apsusc.2022.153228" target="_blank" >https://doi.org/10.1016/j.apsusc.2022.153228</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.apsusc.2022.153228" target="_blank" >10.1016/j.apsusc.2022.153228</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Formation of tubular structures and microneedles on silicon surface by doughnut-shaped ultrashort laser pulses

  • Original language description

    Highly deterministic surface processing is ensured by single-shot ablative modification of the sample surface using radially polarized doughnut-shaped laser pulses with duration of 70 fs.Under such conditions,well reproducible tubular structures are formed whose height is rising with increasing fluence,culminating by closing the structure on the top with formation of a microneedle with a cavity in its base.Upon multi-pulsed irradiation,the height of the needle structures can further increase as compared to those produced by single pulses and top part of the structure is flattened.At a certain number of pulses,melting and ablation cause collapsing the entire structure.The mechanisms responsible for creating the tubular and needle structures are discussed based on the careful analysis of the experimental observations.The generated silicon microtubes and needles can find applications in various fields.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Advanced designing of functional materials: From mono- to BI- And TRI-chromatic excitation with tailored laser pulses</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2022

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Applied Surface Science

  • ISSN

    0169-4332

  • e-ISSN

    1873-5584

  • Volume of the periodical

    592

  • Issue of the periodical within the volume

    Aug.

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    6

  • Pages from-to

    153228

  • UT code for WoS article

    000796161600003

  • EID of the result in the Scopus database

    2-s2.0-85128174117