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Silicon surface patterning by regular stripes of laser-induced periodic surface structures

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00561604" target="_blank" >RIV/68378271:_____/22:00561604 - isvavai.cz</a>

  • Alternative codes found

    RIV/68407700:21340/22:00361860

  • Result on the web

    <a href="https://doi.org/10.1016/j.apsusc.2022.154664" target="_blank" >https://doi.org/10.1016/j.apsusc.2022.154664</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.apsusc.2022.154664" target="_blank" >10.1016/j.apsusc.2022.154664</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Silicon surface patterning by regular stripes of laser-induced periodic surface structures

  • Original language description

    Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using a femtosecond laser at 1030 nm wavelength, a particular range of fluence and beam overlap in two-dimensional scanning scheme has been identified where LIPSS-covered areas organize into stripes perpendicular to the scanning direction. The stripes, where the LIPSS appear, are regularly spaced and located in between the centers of two subsequent Gaussian pulses while the regions receiving the peak pulse fluence are free of LIPSS. The formation of the LIPSS stripes is examined by analyzing local integrated fluence, N-on-1 pulse damage geometry and thresholds of modifications. Processes at play in the generation of such stripes of LIPSS are discussed and an explanation based on interpulse feedback from amorphized areas is proposed.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Advanced designing of functional materials: From mono- to BI- And TRI-chromatic excitation with tailored laser pulses</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2022

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Applied Surface Science

  • ISSN

    0169-4332

  • e-ISSN

    1873-5584

  • Volume of the periodical

    605

  • Issue of the periodical within the volume

    Dec.

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    8

  • Pages from-to

    154664

  • UT code for WoS article

    000856590300001

  • EID of the result in the Scopus database

    2-s2.0-85137168308