Coherence effects in LIPSS formation on silicon wafers upon picosecond laser pulse irradiations
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00603260" target="_blank" >RIV/68378271:_____/25:00603260 - isvavai.cz</a>
Result on the web
<a href="https://hdl.handle.net/11104/0360643" target="_blank" >https://hdl.handle.net/11104/0360643</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6463/ad9d51" target="_blank" >10.1088/1361-6463/ad9d51</a>
Alternative languages
Result language
angličtina
Original language name
Coherence effects in LIPSS formation on silicon wafers upon picosecond laser pulse irradiations
Original language description
Using different laser irradiation patterns to modify the silicon surface, it has been demonstrated that, at rather small overlapping between irradiation spots, highly regular laser-induced periodic surface structures (LIPSS) can be produced already starting from the second laser pulse, provided that polarization direction coincides with the scanning direction. If the laser irradiation spot is shifted from the previous one perpendicular to light polarization, LIPSS are not formed even after many pulses. This coherence effect is explained by a three-wave interference, involving surface electromagnetic waves (SEWs) generated within the irradiated spot, SEWs scattered from the crater edge formed by the previous laser pulse, and the incoming laser pulse, that provides conditions for amplification of the periodic light-absorption pattern. To study possible consequences of SEW scattering from the laser-modified regions, where the refractive index can change due to material melting, amorphization, and the residual stress formed by previous laser pulses, hydrodynamic modelling and simulations have been performed within the melting regime. The simulations show that stress and vertical displacement could be amplified upon laser scanning. Both mechanisms, three-wave interference and stress accumulation, could enable an additional degree of controlling surface structuring.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20501 - Materials engineering
Result continuities
Project
<a href="/en/project/EH22_008%2F0004596" target="_blank" >EH22_008/0004596: Sensors and Detectors for Future Information Society</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physics D-Applied Physics
ISSN
0022-3727
e-ISSN
1361-6463
Volume of the periodical
58
Issue of the periodical within the volume
8
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
085307
UT code for WoS article
001380810100001
EID of the result in the Scopus database
2-s2.0-85219705417