Sensitive detection of Si3N4 thin-film defects via second harmonic generation microscopy

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00619295" target="_blank" >RIV/68378271:_____/25:00619295 - isvavai.cz</a>
Alternative codes found
RIV/61389021:_____/25:00619295 RIV/46747885:24220/25:00012767
Result on the web
<a href="https://opg.optica.org/ol/fulltext.cfm?uri=ol-50-6-1885&id=568913" target="_blank" >https://opg.optica.org/ol/fulltext.cfm?uri=ol-50-6-1885&id=568913</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OL.553380" target="_blank" >10.1364/OL.553380</a>

Result language
angličtina
Original language name
Sensitive detection of Si3N4 thin-film defects via second harmonic generation microscopy
Original language description
Optical coating, an integral part of many optical systems, is prone to damage from environmental exposure and laser irradiation. This underscores the need for reliable and sensitive coating diagnostics. We introduce second harmonic generation (SHG) as a method for the sensitive detection of defects and inhomogeneities within optical thin films. We demonstrate the use of SHG on Si3N4 layers tested for their laser-induced damage threshold. The SHG mapping was compared with commonly used diagnostic techniques, including Nomarski microscopy, white light interferometry, and electron microscopy. Owing to its sensitivity to variations in local symmetry, SHG is able to discern minute alterations in material composition, mechanical stress, and interface structures. Therefore, SHG identified modifications in the tested layers, highly extending the damage recognized by standard methods. Furthermore, we demonstrate SHG’s ability to enhance specific features by modulation of incidence angles and polarization modes. Based on these findings, we propose SHG as an ideal diagnostic tool for the early identification of laser-induced modifications in centrosymmetric thin films.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/EH22_008%2F0004573" target="_blank" >EH22_008/0004573: Breakthrough Laser Technologies for Smart Manufacturing, Space and Bio-Tech Applications</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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