X-Ray Emission from Thin Films on a Substrate - Calculation and Experiments

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F02%3A02079260" target="_blank" >RIV/68407700:21220/02:02079260 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/02:02030210

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

X-Ray Emission from Thin Films on a Substrate - Calculation and Experiments

Original language description

Monte-Carlo simulation of electron transport in solids is widely used in electron microscopy, spectroscopy and microanalysis. The reliability of physical models incorporated in a Monte-Carlo code is usually checked by comparing with experimental results.Elastic or inelastic collisions are usually considered as the basic interactions of electrons with atoms. In our Monte-Carlo code the single scattering model is employed for simulation of X-ray emission from thin films of Au on the Si substrate. The electron beam energy was in the range 10 - 30 keV, the take-off-angle was 40 deg. The simulated values of X-ray production were calculated in our Monte-Carlo code using several models of ionisation cross-sections. For the emitted intensities the depths of inelastic collision and X-ray absorption were taken into account, then the k-ratios were calculated. These data were compared with experimental values of k-ratios calculated from X-ray intensities of Au M and Au L characteristic lines.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BE - Theoretical physics

OECD FORD branch

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Project

<a href="/en/project/GA202%2F02%2F0237" target="_blank" >GA202/02/0237: Electron transport processes near solid surfaces</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Mikrochimica Acta

ISSN

0026-3672

e-ISSN

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Volume of the periodical

139

Issue of the periodical within the volume

1

Country of publishing house

AT - AUSTRIA

Number of pages

6

Pages from-to

179-184

UT code for WoS article

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EID of the result in the Scopus database

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